Service industry
Semiconductor
A large amount of ultrapure water from epitaxy is absolutely vital for operation success and efficiency of the semiconductor industry, which encompasses integrated circuit manufacturing, wafer packaging, etc., with integrated circuit manufacturing (fabs), in particular, demanding the greatest amount of water. The manufacturing process includes photomask, etching, thin film deposition, and other intricate steps. Hundreds of techniques, even thousands of procedures, are involved in the production of an entire wafer (batch). In these manufacturing processes, a very high quality of pure water is required for rinsing before the follow-up method is applied. That’s why the ultrapure water system has also become indispensable in the industry.
The specification demands for pure water systems are becoming more rigorous as the semiconductor industry rapidly expands: water quality, temperature, pressure, and other conditions have to be met. The entire production line may be affected, even shut down, if there is an issue with the quality of the pure water supply.
The specification demands for pure water systems are becoming more rigorous as the semiconductor industry rapidly expands: water quality, temperature, pressure, and other conditions have to be met. The entire production line may be affected, even shut down, if there is an issue with the quality of the pure water supply.
Specified below are the water quality standards required for 12” wafer manufacturing, a most sensitive and rigorous process:
- Resistivity : > 18.18 M-Ohm-cm
- TOC : < 0.5~1 ppb
- Particle :> 0.05um, < 5 pcs/ml
- Boron : < 20 ppt
- Metal : < 1 ppt
- Bacteria : < 1 CFU/l
The demand for water quality for other industries, such as IC Packaging, is not as high as wafer manufacture, indeed; nonetheless, with the advancement of packaging technology and the increasingly expensive process equipment in place, the demand for consistent, dependable and quality water supply, including cooling water, is also growing more rigorous.
We at TAIPURE have more than twenty years of experience in semiconductor-related industries, we have enjoyed proven and widely-recognized successes. At the same time, we are also adapting our designs and products to the ever-changing standards to meet the needs of our customers.
- Resistivity : > 18.18 M-Ohm-cm
- TOC : < 0.5~1 ppb
- Particle :> 0.05um, < 5 pcs/ml
- Boron : < 20 ppt
- Metal : < 1 ppt
- Bacteria : < 1 CFU/l
The demand for water quality for other industries, such as IC Packaging, is not as high as wafer manufacture, indeed; nonetheless, with the advancement of packaging technology and the increasingly expensive process equipment in place, the demand for consistent, dependable and quality water supply, including cooling water, is also growing more rigorous.
We at TAIPURE have more than twenty years of experience in semiconductor-related industries, we have enjoyed proven and widely-recognized successes. At the same time, we are also adapting our designs and products to the ever-changing standards to meet the needs of our customers.