Service industries
Semiconductor
The semiconductor industry must use a large amount of ultrapure water from epitaxy, integrated circuit manufacturing, wafer packaging, etc. Especially in integrated circuit manufacturing (fabs), the manufacturing process includes photomask, etching, thin film deposition, etc. Usually, hundreds of techniques; or even thousands of procedures can produce an entire wafer (batch). In these manufacturing processes, a very high quality of pure water is required to rinse before entering the following method. Therefore, the ultrapure water system has also become indispensable in the semiconductor.
With the rapid development of the semiconductor industry, the requirements for pure water systems are becoming more and more stringent, including water quality, temperature, pressure, and other conditions. All must meet the strict needs of the process. If there is a problem with the quality of the pure water supply, the entire production line may be affected; or even shut down.
With the rapid development of the semiconductor industry, the requirements for pure water systems are becoming more and more stringent, including water quality, temperature, pressure, and other conditions. All must meet the strict needs of the process. If there is a problem with the quality of the pure water supply, the entire production line may be affected; or even shut down.
The following requirement is the highest demand of water quality for 12” wafer manufacture：
- Resistivity : > 18.18 M-Ohm-cm
- TOC : < 0.5~1 ppb
- Particle :> 0.05um, < 5 pcs/ml
- Boron : < 20 ppt
- Metal : < 1 ppt
- Bacteria : < 1 CFU/l
The demand for water quality for other industries like IC Packaging is not as high as wafer manufacture. However, with the advancement of packaging technology and increasingly expensive process equipment, the water supply requirement, including cooling water, is becoming more and more stringent. The members of TAIPURE have more than twenty years of experience in semiconductor-related industries; we have a lot of actual achievements during this period. At the same time, with the ever-changing requirements, we also continue to improve our designs and products. Quality to meet the needs of the owners.
- Resistivity : > 18.18 M-Ohm-cm
- TOC : < 0.5~1 ppb
- Particle :> 0.05um, < 5 pcs/ml
- Boron : < 20 ppt
- Metal : < 1 ppt
- Bacteria : < 1 CFU/l
The demand for water quality for other industries like IC Packaging is not as high as wafer manufacture. However, with the advancement of packaging technology and increasingly expensive process equipment, the water supply requirement, including cooling water, is becoming more and more stringent. The members of TAIPURE have more than twenty years of experience in semiconductor-related industries; we have a lot of actual achievements during this period. At the same time, with the ever-changing requirements, we also continue to improve our designs and products. Quality to meet the needs of the owners.